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(Industrial & Engineering Chemistry Research) Fabrication of Copper Patterns on Polydimethylsiloxane through Laser-Induced Selective Metallization
作者:Haoran Xu, Jihai Zhang, Jin Feng, and Tao Zhou*
關(guān)鍵字:PDMS substrate, NIR laser, selective metallization, conductive patterns
論文來源:期刊
具體來源:Industrial & Engineering Chemistry Research, 2021, 60, 8821-8828
發(fā)表時間:2021年

Selective metallization is widely used in the fabrication of conductive circuits and metallized patterns. In this work, a facile approach for the fabrication of copper patterns on polydimethylsiloxane (PDMS) substrates was developed through a 1064 nm pulsed near-infrared (NIR) laser activation and selective metallization. The laser sensitizer of copper hydroxyl phosphate [Cu2(OH)PO4] and antimony-doped tin oxide (ATO) were incorporated into PDMS resin to prepared laser direct structuring (LDS) materials, respectively. The physical morphology and chemical composition of PDMS/Cu2(OH)PO4 and PDMS/ATO after 1064 nm pulsed NIR laser activation and metallization characterizations were determined. The laser-irradiated area of the PDMS substrate exhibited catalyst activation, which could trigger an electroless copper plating (ECP) reaction. The obtained copper patterns exhibit strong mechanical adhesion on the PDMS substrate, which reaches class 5B level after an adhesive tape test (ASTM D3359 standard). Moreover, the conductivity of the obtained copper pattern on PDMS/Cu2(OH)PO4 and PDMS/ATO is around 2.09 × 107 and 1.38 × 107 Ω?1·m?1. This study provides a strategy to fabricate PDMSbased LDS materials for large-scale industrial applications.