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?/span>?/span>?/span>?/span>?/span>?/span>?/span>E?/span>?/span>?/span>?/span>?/span>?/span>U?/span>?/span>?/span>?/span>U?/span>c?/span>?/span>?/span>?/span>p?/span>l?/span>?/span>I?/span>所?/span>?/span>?/span>?/span>?/span>?/span>?/span>ACS Applied Materials & Interfaces?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Effects of Oxygen Vacancies and Cation Valence States on the Triboelectric Property of Substoichiometric Oxide Films?/span>?/span>?/span>?/span>Q?/span>DOI: 10.1021/acsami.1c09248Q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>?/span>?/span>l?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>U?/span>c?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Q?/span>q?/span>q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>着?/span>I?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>Q?/span>开?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>l?/span>?/span>?/span>?/span>TiO2-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>I?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>I?/span>?/span>q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Ti3 ?/span>E?/span>?/span>?/span>?/span>?/span>Ti4 ?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>?/span>?/span>Ar/H2?/span>?/span>?/span>退?/span>Q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>q?/span>?/span>?/span>?/span>?/span>q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>退?/span>Q?/span>?/span>?/span>?/span>I?/span>?/span>?/span>?/span>?/span>?/span>?/span>q?/span>?/span>Al2O3-x, Ta2O5-x?/span>Cr2O3-x{?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>I?/span>Q?/span>q?/span>一?/span>?/span>?/span>?/span>?/span>I?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>?/span>I?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>U?/span>?/span>?/span>IM?/span>TENGs?/span>最?/span>Q?/span>?/span>?/span>?/span>?/span>l?/span>?/span>Q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>C?/span>?/span>?/span>I?/span>?/span>?/span>?/span>?/span>?/span>q?/span>?/span>?/span>?/span>?/span>?/span>?/span>~?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>Q?/span>?/span>?/span>?/span>?/span>?/span>?/span>l?/span>?/span>?/span>?/span>?/span>U?/span>q?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>I?/span>?/span>?/span>?/span>?/span>?/span>开?/span>?/span>?/span>?/span>_?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>IM?/span>TENGsQ?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>U?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>q?/span>一?/span>?/span>?/span>?/span>?/span>


?/span>1 ?/span>?/span>20 sccm?/span>?/span>?/span>U?/span>?/span>TiO2-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (a) ?/span>?/span>?/span>?/span>?/span>?/span> (b) XRDl?/span>?/span> (c) ?/span>?/span>?/span>?/span> (d-e) ?/span>?/span>?/span>?/span>Ti2p?/span>O1s?/span>XPS?/span> (f) ?/span>?/span>?/span>?/span>I?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>



?/span>2 ?/span>?/span>80 sccm?/span>?/span>?/span>U?/span>?/span>TiO2-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (a)I?/span>?/span>?/span>?/span>?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (b) ?/span>?/span>?/span>?/span>Ti2p?/span>XPS?/span> (c) ?/span>?/span>?/span>?/span> (d) ?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>


?/span>3 Al2O3-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (a) ?/span>?/span>?/span>?/span>?/span>?/span> (b) XRDl?/span>?/span> (c) ?/span>?/span>?/span>?/span> (c-d) Al2p?/span>O1s?/span>XPS?/span> (e) ?/span>?/span>?/span>5 sccm?/span>?/span>?/span>U?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (f) ?/span>?/span>?/span>20 sccm?/span>?/span>?/span>U?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>


?/span>4 Ta2O5-x?/span>Cr2O3-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (a) 退?/span>?/span>?/span>Ta2O5-x?/span>?/span>?/span>XRDl?/span>?/span> (b) 退?/span>?/span>?/span>Ta2O5-x?/span>?/span>?/span>?/span>Ta4f?/span>XPS?/span> (c) ?/span>?/span>?/span>Ta2O5-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (d) Cr2O3-x?/span>?/span>退?/span>?/span>?/span>?/span>XRDl?/span>?/span> (e) Cr2O3-x?/span>?/span>?/span>?/span>?/span>Cr2p?/span>XPS?/span> (f) ?/span>?/span>?/span>Cr2O3-x?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>


?/span>5 TiO2-x?/span>?/span>?/span>?/span>IM-TENGs?/span>?/span>?/span> (a) IM-TENGs?/span>C?/span>?/span>?/span> (b-c) ?/span>退?/span>?/span>?/span>573 K退?/span>?/span>?/span>TiO2-x?/span>?/span>?/span>?/span>?/span>IM-TENG?/span>VOC?/span>QSC (d-e) ?/span>573 K退?/span>?/span>?/span>TiO2-x?/span>?/span>?/span>?/span>?/span>IM-TENG?/span>VOC?/span>QSC (f) ?/span>?/span>l?/span>?/span>IM-TENGs?/span>VOC?/span>


?/span>6 ?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span> (a-c) ?/span>?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>U?/span> (d-f) ?/span>?/span>?/span>T1?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>U?/span> (g-i) ?/span>?/span>?/span>T2?/span>?/span>退?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>?/span>U?/span>?/span>T1<T2?/span>


?/strong>?/strong>?/strong>?/strong>

https://pubs.acs.org/doi/full/10.1021/acsami.1c09248

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